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Motorola Sensor Device Data

700 kPa

Uncompensated

Silicon Pressure Sensors

The MPX700 series device is a silicon piezoresistive pressure sensor providing a very

accurate and linear voltage output — directly proportional to the applied pressure. This

standard, low cost, uncompensated sensor permits manufacturers to design and add

their own external temperature compensating and signal conditioning networks.

Compensation techniques are simplified because of the predictability of Motorola’s single

element strain gauge design.

Features

•

Low Cost

•

Patented, Silicon Shear Stress Strain Gauge Design

•

Linearity to

0.5% (Max) Linearity

•

Easy to Use Chip Carrier Package Options

•

Ratiometric to Supply Voltage

•

60 mV Span (Typ)

•

Absolute, Differential and Gauge Options

Application Examples

•

Environmental Control Systems

•

Pneumatic Control Systems

•

Appliances

•

Automotive Performance Controls

•

Medical Instrumentation

•

Industrial Controls

Figure 1 illustrates a schematic of the internal circuitry on the stand–alone pressure

sensor chip.

Figure 1. Uncompensated Pressure Sensor Schematic

PIN 3

X–ducer

PIN 2

PIN 4

+ Vout

– Vout

+ VS

PIN 1

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the X–ducer is directly proportional to the differential

pressure applied.

The absolute sensor has a built–in reference vacuum. The output voltage will decrease

as vacuum, relative to ambient, is drawn on the pressure (P1) side.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,

output voltage increases as increasing vacuum is applied to the vacuum (P2) side

relative to the pressure (P1) side. This sensor is designed for applications where P1 is

always greater than, or equal to P2.

Senseon and X–ducer are trademarks of Motorola, Inc.

Order this document

by MPX700/D

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

Motorola, Inc. 1997

BASIC CHIP

CARRIER ELEMENT

CASE 344–15, STYLE 1

DIFFERENTIAL

PORT OPTION

CASE 344C–01, STYLE 1

MPX700

SERIES

0 to 700 kPa (0 – 100 psi)

60 mV FULL SCALE SPAN

(TYPICAL)

NOTE: Pin 1 is the notched pin.

PIN NUMBER

Gnd

+Vout

–Vout

REV 5

MPX700 SERIES

Motorola Sensor Device Data

MAXIMUM RATINGS

Rating

Symbol

Value

Unit

Overpressure(8) (P2

1 Atmosphere)

P1max

2800

kPa

Burst Pressure(8) (P2

1 Atmosphere)

P1burst

5000

kPa

Storage Temperature

Tstg

– 40 to +125

Operating Temperature

– 40 to +125

OPERATING CHARACTERISTICS

(VS = 3.0 Vdc, TA = 25

C unless otherwise noted. P1

P2; P2

1 Atmosphere.)

Characteristic

Symbol

Min

Typ

Max

Unit

Pressure Range(1)

POP

—

700

kPa

Supply Voltage(2)

—

3.0

6.0

Vdc

Supply Current

—

6.0

—

mAdc

Full Scale Span(3)

VFSS

Offset(4)

Voff

Sensitivity

∆

—

V/kPa

Linearity(5)

MPX700D

MPX700A

—

– 0.5

– 1.0

—

0.5

1.0

%VFSS

Pressure Hysteresis(5) (0 to 700 kPa)

—

0.1

—

%VFSS

Temperature Hysteresis(5) (– 40

C to +125

—

0.5

—

%VFSS

Temperature Coefficient of Full Scale Span(5)

TCVFSS

– 0.21

—

– 0.15

%VFSS/

Temperature Coefficient of Offset(5)

TCVoff

—

Temperature Coefficient of Resistance(5)

TCR

0.34

—

0.4

%Zin/

Input Impedance

Zin

400

—

550

Ω

Output Impedance

Zout

750

—

1800

Ω

Response Time(6) (10% to 90%)

—

1.0

—

Warm–Up (7)

—

MECHANICAL CHARACTERISTICS

Characteristic

Symbol

Min

Typ

Max

Unit

Weight (Basic Element, Case 344–15)

—

2.0

—

Grams

NOTES:

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional

error due to device self–heating.

3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

minimum rated pressure.

4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.

5. Accuracy (error budget) consists of the following:

•

Linearity:

Output deviation from a straight line relationship with pressure, using end point method, over the specified

pressure range.

•

Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure

applied.

•

Pressure Hysteresis:

Output deviation at any pressure within the specified range, when this pressure is cycled to and from the

minimum or maximum rated pressure, at 25

•

TcSpan:

Output deviation at full rated pressure over the temperature range of 0 to 85

C, relative to 25

•

TcOffset:

Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85

C, relative

to 25

•

TCR:

Zin deviation with minimum rated pressure applied, over the temperature range of – 40

C to +125

relative to 25

6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

7. Warm–up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.

8. Basic Element only, Case 344–15.

9. P2 max : 500 kPa.

MPX700 SERIES

Motorola Sensor Device Data

TEMPERATURE COMPENSATION

Figure 2 shows the typical output characteristics of the

MPX700 series over temperature.

The X–ducer piezoresistive pressure sensor element is a

semiconductor device which gives an electrical output signal

proportional to the pressure applied to the device. This de-

vice uses a unique transverse voltage diffused semiconduc-

tor strain gauge which is sensitive to stresses produced in a

thin silicon diaphragm by the applied pressure.

Because this strain gauge is an integral part of the silicon

diaphragm, there are no temperature effects due to differ-

ences in the thermal expansion of the strain gauge and the

diaphragm, as are often encountered in bonded strain gauge

pressure sensors. However, the properties of the strain

gauge itself are temperature dependent, requiring that the

device be temperature compensated if it is to be used over

an extensive temperature range.

Temperature compensation and offset calibration can be

achieved rather simply with additional resistive components

or by designing your system using the MPX2700 series

sensors.

Several approaches to external temperature compensa-

tion over both – 40 to +125

C and 0 to + 80

C ranges are

presented in Motorola Applications Note AN840.

LINEARITY

Linearity refers to how well a transducer’s output follows

the equation: Vout = Voff + sensitivity x P over the operating

pressure range (Figure 3). There are two basic methods for

calculating nonlinearity: (1) end point straight line fit or (2) a

least squares best line fit. While a least squares fit gives the

“best case” linearity error (lower numerical value), the cal-

culations required are burdensome.

Conversely, an end point fit will give the “worst case” error

(often more desirable in error budget calculations) and the

calculations are more straightforward for the user. Motorola’s

specified pressure sensor linearities are based on the end

point straight line method measured at the midrange

pressure.

Figure 2. Output versus Pressure Differential

Figure 3. Linearity Specification Comparison

Figure 4. Cross–Sectional Diagrams (not to scale)

OFFSET

(VOFF)

OUTPUT

(mVdc)

MAX

POP

SPAN

(VFSS)

PRESSURE (kPA)

ACTUAL

THEORETICAL

LINEARITY

ÉÉÉÉÉÉÉÉÉÉÉ

SILICONE GEL

DIE COAT

WIRE BOND

LEAD FRAME

DIFFERENTIAL/GAUGE

DIE

STAINLESS STEEL

METAL COVER

EPOXY

CASE

DIFFERENTIAL/GAUGE ELEMENT

DIE

BOND

ÉÉÉÉÉÉÉÉÉÉÉ

SILICONE GEL

DIE COAT

WIRE BOND

LEAD FRAME

ABSOLUTE

DIE

STAINLESS STEEL

METAL COVER

EPOXY

CASE

DIE

BOND

ABSOLUTE ELEMENT

PSI

700

560

420

280

140

kPa

OUTPUT

(mVdc)

PRESSURE DIFFERENTIAL

100

SPAN

RANGE

(TYP)

OFFSET

(TYP)

MPX700

VS = 3 Vdc

P1 > P2

– 40

+ 25

+ 125

Figure 4 illustrates the differential or gauge configuration

in the basic chip carrier (Case 344–15). A silicone gel iso-

lates the die surface and wire bonds from the environment,

while allowing the pressure signal to be transmitted to the sil-

icon diaphragm.

The MPX700 series pressure sensor operating character-

istics and internal reliability and qualification tests are based

on use of dry air as the pressure media. Media other than dry

air may have adverse effects on sensor performance and

long term reliability. Contact the factory for information re-

garding media compatibility in your application.

MPX700 SERIES

Motorola Sensor Device Data

PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor

as the Pressure (P1) side and the Vacuum (P2) side. The

Pressure (P1) side is the side containing silicone gel which

isolates the die from the environment. The differential or

gauge sensor is designed to operate with positive differential

pressure applied, P1 > P2. The absolute sensor is designed

for vacuum applied to P1 side.

The Pressure (P1) side may be identified by using the

table on the below:

Part Number

Case Type

Pressure (P1) Side Identifier

MPX700A, MPX700D

344–15

Stainless Steel Cap

MPX700DP

344C–01

Side with Part Marking

MPX700AP, MPX700GP

344B–01

Side with Port Attached

MPX700GVP

344D–01

Stainless Steel Cap

MPX700AS, MPX700GS

344E–01

Side with Port Attached

MPX700ASX, MPX700GSX

344F–01

Side with Port Attached

MPX700GVSX

344G–01

Stainless Steel Cap

ORDERING INFORMATION

MPX700 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic

element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure

connections.

MPX Series

Device Type

Options

Case Type

Order Number

Device Marking

Basic Element

Absolute, Differential

Case 344–15

MPX700A

MPX700D

MPX700A

MPX700D

Ported Elements

Differential

Case 344C–01

MPX700DP

Absolute, Gauge

Case 344B–01

MPX700AP

MPX700GP

MPX700AP

MPX700GP

Gauge Vacuum

Case 344D–01

MPX700GVP

Absolute, Gauge Stove Pipe

Case 344E–01

MPX700AS

MPX700GS

MPX700A

MPX700D

Absolute, Gauge Axial

Case 344F–01

MPX700ASX

MPX700GSX

MPX700A

MPX700D

Gauge Vacuum Axial

Case 344G–01

MPX700GVSX

MPX700D

MPX700 SERIES

Motorola Sensor Device Data

PACKAGE DIMENSIONS

CASE 344–15

ISSUE W

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

0.136 (0.005)

PIN 1

4 PL

SEATING

PLANE

–T–

–A–

DIM

MIN

MAX

MIN

MAX

MILLIMETERS

INCHES

0.595

0.630

15.11

16.00

0.514

0.534

13.06

13.56

0.200

0.220

5.08

5.59

0.016

0.020

0.41

0.51

0.048

0.064

1.22

1.63

0.100 BSC

2.54 BSC

0.014

0.016

0.36

0.40

0.695

0.725

17.65

18.42

30 NOM

0.475

0.495

12.07

12.57

0.430

0.450

10.92

11.43

NOTES:

1. DIMENSIONING AND TOLERANCING PER ASME

Y14.5M, 1994.

2. CONTROLLING DIMENSION: INCH.

3. DIMENSION –A– IS INCLUSIVE OF THE MOLD

STOP RING. MOLD STOP RING NOT TO EXCEED

16.00 (0.630).

POSITIVE

PRESSURE (P1)

POSITIVE

PRESSURE

(P1)

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

CASE 344B–01

ISSUE B

SEATING

PLANE

–T–

PORT #1

POSITIVE

PRESSURE

PIN 1

–A–

–Q–

4 PL

–P–

0.25 (0.010)

0.13 (0.005)

1 2

3 4

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5, 1982.

2. CONTROLLING DIMENSION: INCH.

DIM

MIN

MAX

MIN

MAX

MILLIMETERS

INCHES

1.145

1.175

29.08

29.85

0.685

0.715

17.40

18.16

0.305

0.325

7.75

8.26

0.016

0.020

0.41

0.51

0.048

0.064

1.22

1.63

0.100 BSC

2.54 BSC

0.182

0.194

4.62

4.93

0.014

0.016

0.36

0.41

0.695

0.725

17.65

18.42

0.290

0.300

7.37

7.62

0.420

0.440

10.67

11.18

0.153

0.159

3.89

4.04

0.153

0.159

3.89

4.04

0.230

0.250

5.84

6.35

0.910 BSC

23.11 BSC

0.220

0.240

5.59

6.10

(P1)

MPX700 SERIES

Motorola Sensor Device Data

PACKAGE DIMENSIONS — CONTINUED

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

PORT #2

PORT #1

PORT #2

VACUUM

SEATING

PLANE

SEATING

PLANE

PORT #1

POSITIVE PRESSURE

–Q–

1 2

PIN 1

4 PL

–P–

–T–

0.25 (0.010)

0.13 (0.005)

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

DIM

MIN

MAX

MIN

MAX

MILLIMETERS

INCHES

1.145

1.175

29.08

29.85

0.685

0.715

17.40

18.16

0.405

0.435

10.29

11.05

0.016

0.020

0.41

0.51

0.048

0.064

1.22

1.63

0.100 BSC

2.54 BSC

0.182

0.194

4.62

4.93

0.014

0.016

0.36

0.41

0.695

0.725

17.65

18.42

0.290

0.300

7.37

7.62

0.420

0.440

10.67

11.18

0.153

0.159

3.89

4.04

0.153

0.159

3.89

4.04

0.063

0.083

1.60

2.11

0.910 BSC

23.11 BSC

0.248

0.278

6.30

7.06

0.310

0.330

7.87

8.38

–A–

0.220

0.240

5.59

6.10

(P2)

(P1)

CASE 344C–01

ISSUE B

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5, 1982.

2. CONTROLLING DIMENSION: INCH.

SEATING

PLANE

–T–

PORT #2

VACUUM

POSITIVE

PRESSURE

PIN 1

–A–

–Q–

4 PL

–P–

0.25 (0.010)

0.13 (0.005)

DIM

MIN

MAX

MIN

MAX

MILLIMETERS

INCHES

1.145

1.175

29.08

29.85

0.685

0.715

17.40

18.16

0.305

0.325

7.75

8.26

0.016

0.020

0.41

0.51

0.048

0.064

1.22

1.63

0.100 BSC

2.54 BSC

0.182

0.194

4.62

4.93

0.014

0.016

0.36

0.41

0.695

0.725

17.65

18.42

0.290

0.300

7.37

7.62

0.420

0.440

10.67

11.18

0.153

0.159

3.89

4.04

0.153

0.158

3.89

4.04

0.230

0.250

5.84

6.35

0.910 BSC

23.11 BSC

1 2

3 4

0.220

0.240

5.59

6.10

(P2)

(P1)

CASE 344D–01

ISSUE B

MPX700 SERIES

Motorola Sensor Device Data

PACKAGE DIMENSIONS — CONTINUED

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

DIM

MIN

MAX

MIN

MAX

MILLIMETERS

INCHES

0.690

0.720

17.53

18.28

0.245

0.255

6.22

6.48

0.780

0.820

19.81

20.82

0.016

0.020

0.41

0.51

0.048

0.064

1.22

1.63

0.100 BSC

2.54 BSC

0.014

0.016

0.36

0.41

0.345

0.375

8.76

9.53

0.300

0.310

7.62

7.87

0.178

0.186

4.52

4.72

0.182

0.194

4.62

4.93

BACK SIDE

VACUUM

PIN 1

4 PL

PORT #1

POSITIVE

PRESSURE

SEATING

PLANE

2 1